JPS6324435Y2 - - Google Patents

Info

Publication number
JPS6324435Y2
JPS6324435Y2 JP1979120295U JP12029579U JPS6324435Y2 JP S6324435 Y2 JPS6324435 Y2 JP S6324435Y2 JP 1979120295 U JP1979120295 U JP 1979120295U JP 12029579 U JP12029579 U JP 12029579U JP S6324435 Y2 JPS6324435 Y2 JP S6324435Y2
Authority
JP
Japan
Prior art keywords
electron beam
electron
sample
intensity
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979120295U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5638864U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979120295U priority Critical patent/JPS6324435Y2/ja
Publication of JPS5638864U publication Critical patent/JPS5638864U/ja
Application granted granted Critical
Publication of JPS6324435Y2 publication Critical patent/JPS6324435Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1979120295U 1979-08-31 1979-08-31 Expired JPS6324435Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979120295U JPS6324435Y2 (en]) 1979-08-31 1979-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979120295U JPS6324435Y2 (en]) 1979-08-31 1979-08-31

Publications (2)

Publication Number Publication Date
JPS5638864U JPS5638864U (en]) 1981-04-11
JPS6324435Y2 true JPS6324435Y2 (en]) 1988-07-05

Family

ID=29352483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979120295U Expired JPS6324435Y2 (en]) 1979-08-31 1979-08-31

Country Status (1)

Country Link
JP (1) JPS6324435Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5517161Y2 (en]) * 1976-02-05 1980-04-21
JPS5326192A (en) * 1976-08-23 1978-03-10 Hitachi Ltd Compound analyzer

Also Published As

Publication number Publication date
JPS5638864U (en]) 1981-04-11

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